Professor
Giin-Shan Chen,PH.D
陳錦山博士
Distinguished Professor, Department of Materials Science and Engineering
學歷
畢業學校 主修學門系所 學位
英國劍橋大學 材料工程系 博士
國立清華大學 材科科學所 碩士
國立成功大學 材料工程系 學士
學科專長
微電/光電薄膜製成
穿透式電子顯微鏡分析
真空技術
科技部計畫 (2018~迄今)
無電鍍全鈷導線之超填充與全包覆強化工程(2020/08-2021/07)
全面自組障無電鍍銅合金導線與孔隙介電層整合(2018/08-2020/07)
二氧化鈦複合度層披覆之高持久度透光太陽能電池玻璃覆版研製(2018/06-2019/05)
全面自主障無電鍍銅線與高孔隙介電層整合(2017/08~2018/07)
孔隙介電層之表面工程暨全程無電鍍超微銅導線填充工程(2016/08~2017/07)
近期發表論文
[1] G.S. Chen*, W.L. Gao, C.C. Chang, J.S. Fang, Y.L. Cheng, Synergy of mercaptosilane monolayer embedding and extremely dilute cobalt alloying for metallization of copper without a conventional metallic barrier, Mater. Phys. Chem. 259 (2021) 124034.
[2] J.S. Fang, T.M. Yang, Y.L. Cheng, G.S. Chen*, (3-aminopropyl)trimethoxysilane self-assembled monolayer as barrier of porous SiOCH for electroless Cu metallization: optimizations of SiOCH hydroxylation and monolayer functionalization, ECS J. Solid State Sci. Technol. 10 (2021) 023003.
[3] G.S. Chen*, J.H. Chen, J.N. Kuo, H. Niu, Highly crystallized mesoporous anatase films with enhanced photoactivity derived from sputter deposited TiO2-WO3 composites: the positive role of sodium, Appl. Surf. Sci. (submitted, Mar. 2021)
[4] J.S. Fang, Y.L. Wu, Y.L. Cheng, G.S. Chen, Synthesis of dilute phosphorous-embedded Co alloy films on a NiSi substrate with a superior gap-filling capability for nanoscale interconnects, J. Electrochem. Soc. (2021, in press)
[5] G.S. Chen*, R.J. Tau, J.S. Fang, Y.L. Cheng, Y.C. Chen, Mechanism of strengthening electroless plated copper films with extremely dilute oxide dispersion alloying: The optimal MnO addition, Appl. Surf. Sci. 527 (2020) 146816.